Updated and expanded! Reviews the theory, materials, and processes that are used in the lithographic process. Opens with a brief historical introduction to the advances in microlithography. Discusses four major topics: the physics of the lithographic process, organic resist materials, resist processing, and plasma etching. Designed as a tutorial for researchers with no experience in the field, as well as those experienced in microlithography. Will also prove invaluable to those already involved in microlithography. Includes ...
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Updated and expanded! Reviews the theory, materials, and processes that are used in the lithographic process. Opens with a brief historical introduction to the advances in microlithography. Discusses four major topics: the physics of the lithographic process, organic resist materials, resist processing, and plasma etching. Designed as a tutorial for researchers with no experience in the field, as well as those experienced in microlithography. Will also prove invaluable to those already involved in microlithography. Includes numerous references for more detailed reading on specific aspects of microlithography.
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Add this copy of Intro Microlith 2ed Acspr C to cart. $20.21, very good condition, Sold by ThriftBooks-Reno rated 4.0 out of 5 stars, ships from Reno, NV, UNITED STATES, published 1994 by Academic.
Add this copy of Intro Microlith 2ed Acspr C to cart. $20.21, very good condition, Sold by ThriftBooks-Baltimore rated 4.0 out of 5 stars, ships from Halethorpe, MD, UNITED STATES, published 1994 by Academic.
Add this copy of Intro Microlith 2ed Acspr C to cart. $20.21, good condition, Sold by ThriftBooks-Reno rated 4.0 out of 5 stars, ships from Reno, NV, UNITED STATES, published 1994 by Academic.
Add this copy of Intro Microlith 2ed Acspr C to cart. $20.21, good condition, Sold by ThriftBooks-Baltimore rated 4.0 out of 5 stars, ships from Halethorpe, MD, UNITED STATES, published 1994 by Academic.
Add this copy of Intro Microlith 2ed Acspr C to cart. $228.97, new condition, Sold by Paperbackshop rated 5.0 out of 5 stars, ships from Bensenville, IL, UNITED STATES, published 2019 by Oxford University Press.
