Use of polymers is widespread in the electronics industry, both in manufacturing integrated circuits and as components in the completed devices. In addition to providing an update in conventional microlithography technology, Micro- and Nanopatterning Polymers describes new patterning techniques involving block copolymers, direct deposition of metal oxides and other materials, and image-wise chemical deposition. It illustrates the challenges and opportunities in designing ArF excimer laser resists in the next generation of ...
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Use of polymers is widespread in the electronics industry, both in manufacturing integrated circuits and as components in the completed devices. In addition to providing an update in conventional microlithography technology, Micro- and Nanopatterning Polymers describes new patterning techniques involving block copolymers, direct deposition of metal oxides and other materials, and image-wise chemical deposition. It illustrates the challenges and opportunities in designing ArF excimer laser resists in the next generation of lithographic technology. The book includes discussions of material design alternatives, acid generator chemistries, and acid diffusion mechanisms in chemically amplified resists, which have now replaced novolac/diazoquinone resists in device manufacturing. Providing insight into the most recent breakthroughs in nano-technology, this unique book is an important step in the development of integrated circuits.
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Add this copy of Micro-and Nanopatterning Polymers (\Vol. 706) (Acs to cart. $22.00, new condition, Sold by bookbooth rated 5.0 out of 5 stars, ships from Berea, OH, UNITED STATES, published 1998 by Oxford University Press, Incorporated.
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New. 6" x 9" New. Multiple copies are available. 386 pages. Consists of 27 papers presented at the 1997 ACS Polymeric Materials conference, focusing on micro-and nanopatterning.
Add this copy of Micro-and Nanopatterning Polymers (Acs Symposium Series to cart. $23.01, fair condition, Sold by HPB-Red rated 5.0 out of 5 stars, ships from Dallas, TX, UNITED STATES, published 1998 by Amer Chemical Society.
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Add this copy of Micro-and Nanopatterning Polymers (Acs Symposium Series to cart. $56.53, good condition, Sold by Bonita rated 4.0 out of 5 stars, ships from Santa Clarita, CA, UNITED STATES, published 1998 by Amer Chemical Society.
Add this copy of Micro-and Nanopatterning Polymers (Acs Symposium Series to cart. $77.21, new condition, Sold by Bonita rated 4.0 out of 5 stars, ships from Santa Clarita, CA, UNITED STATES, published 1998 by American Chemical Society.
Add this copy of Micro-and Nanopatterning Polymers (Acs Symposium Series to cart. $91.17, new condition, Sold by Just one more Chapter rated 4.0 out of 5 stars, ships from Miramar, FL, UNITED STATES, published 1998 by American Chemical Society.
Add this copy of Micro-and Nanopatterning Polymers to cart. $100.89, new condition, Sold by Basi6 International rated 5.0 out of 5 stars, ships from Irving, TX, UNITED STATES, published 1998 by American Chemical Society.
Add this copy of Micro-and Nanopatterning Polymers to cart. $100.89, new condition, Sold by discount_scientific_books rated 5.0 out of 5 stars, ships from Sterling Heights, MI, UNITED STATES, published 1998 by American Chemical Society.
Add this copy of Micro-and Nanopatterning Polymers to cart. $101.89, new condition, Sold by Basi6 International rated 5.0 out of 5 stars, ships from Irving, TX, UNITED STATES, published 1998 by American Chemical Society.
Add this copy of Micro-and Nanopatterning Polymers to cart. $102.77, new condition, Sold by Educational Media Centre rated 4.0 out of 5 stars, ships from New Delhi, DELHI, INDIA, published 1998 by American Chemical Society.
